Tencor Surfscan Wafer Inspection System – Parts Contract
Tencor Surfscan Wafer Inspection System – Parts Contract – Part # BSI-Parts Plan Index #13
Details:
✓ Universal service tool kit
✓ (1)NIST Calibration Wafer Standard
✓ 100% coverage on ALL parts*
✓ Senior-level tech support
✓ Shipping both ways: Saver
✓ New upgraded or refurbished parts
*Argon Laser and Puck replacement—1 per year—as needed due to failure
