All Surfscan Support Roads Lead to Brumley South!
What Sets Us Apart
Since 1992, Brumley South has specialized in helping semiconductor manufacturers maximize the performance and lifespan of legacy Tencor Surfscan wafer inspection systems. As OEM parts became harder to obtain, we developed proprietary replacement components, refurbishment services, and technical support programs that let customers keep operating proven inspection equipment with confidence.
Today, Brumley South supports customers worldwide with engineered replacement parts, optical upgrades, preventative maintenance solutions, and refurbished systems.
Our Mission
Help semiconductor manufacturers extend equipment life, reduce downtime, and maximize the value of existing inspection systems through innovative engineering and exceptional customer support.
We’re Not Just Parts Suppliers – We’re Problem Solvers
While other companies offer “as-is” parts, we go beyond. Our team of expert engineers doesn’t just understand how KLA-Tencor systems work – we’ve redesigned replacement parts to be drop-in solutions with enhancements. No one else in the world can offer this level of engineering excellence.
Unparalleled Expertise & Experience
- Supporting KLA-Tencor Models: 6100, 6200, 6220, 6400, 6420
- ADE Metrology Tools (9500, 9700, 9600 Series) – #1 in the World
- Five engineers with over 20 years of experience each
- In business since 1992 with a proven track record
Our Comprehensive Solutions
New & Refurbished Equipment
- Brand new replacement parts with a 1-year warranty
- Fully refurbished wafer inspection tools ready to ship
- Custom tool modifications to fit your specific needs
NIST PSL Calibration Standards
- We manufacture our own NIST-traceable calibration standards
- Complete calibration services for your systems
- Custom photo mask standards
Flexible Service Options
- Field service and consulting
- “Try before you buy” program
- Customer approval visits to our facility before shipping
- Exchange program – replace vs. repair for maximum value
- Net 60-120 day payment terms available
- Flexible payment plans
- Supporting KLA-Tencor Models: 6100, 6200, 6220, 6400, 6420 # 1 in the world!
- ADE Metrology Tools (9500, 9700, 9600 Series) – #1 in the World
- Engineers with over 120 years of experience.
- In business since 1992 with a proven track record
Why Choose Brumley South?
Over 30 years supporting Surfscan systems
Proprietary replacement components
Made in the USA
Engineering-driven innovation
Technical expertise
Long-term equipment support
Unique Market Position
We're the only source for new, redesigned parts for KLA-Tencor systems. In fact, other system sellers buy their parts from us! We even supply the original equipment manufacturer (OEM) – that's how trusted our quality is.
Customer-Centric Approach
We offer a comprehensive returns policy on parts that don't meet expectations. Need your part to be tested? We can test in our test beds.
Immediate stock availability answers.
Global Reach, Personal Touch
While we ship worldwide from our North Carolina facility, we maintain the personal relationships that have made us successful. We're active members of the SEMI group and the powerful FAB Owners Association (FOA), connecting with key industry contacts four times per year.